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All layer thickness measurement
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All layer thickness measurement
Layer Thickness Measurement
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FR-pOrtable
Single Point Measurement
POLOS
FR-pOrtable is a unique, miniaturized, turn-key solution for accurate & precise non-destructive optical characterization of transparent and semi-transparent
12 nm to 90 μm
380 nm - 1020 nm
20,000 h
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FR-pRo
Single Point Measurement
POLOS
FR-pRo is a modular and expandable platform for the characterization of coatings in the 1 nm - 1 mm thickness range. It is used in a wide range of applications
1 nm to 120 μm
190 nm - 1100 nm
Tabletop System
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FR-Scanner
Wafer Mapping
POLOS
FR-Scanner is a compact bench-top tool for the automatic characterization of films and coatings on wafers, masks or other substrates. It is ideal for the fast a
3 nm to 100 um
200 nm - 1020 nm
Tabletop System