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All layer thickness measurement

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FR-pRo
FR-pRo
Single Point Measurement
POLOS
FR-pRo
FR-pRo is a modular and expandable platform for the characterization of coatings in the 1 nm - 1 mm thickness range. It is used in a wide range of applications
1 nm to 120 μm
190 nm - 1100 nm
Table-top System
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5 Versions:
FR-pRo 380 nm - 1000 nm spectral rangeFR-pRo 190 nm - 1700 nm spectral rangeFR-pRo 190 nm - 1000 nm spectral range
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FR-Mic
FR-Mic
Single Point Measurement
POLOS
FR-Mic
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8 Versions:
FR-Mic 200 nm - 1020 nm spectral rangeFR-Mic 200 nm - 1100 nm spectral rangeFR-Mic 200 nm - 1700 nm spectral range
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FR-ES
FR-ES
Single Point Measurement
POLOS
FR-ES
Compact and light-weighted unit for the characterization of coatings. Perform reflectance and transmittance measurements in the 370 - 1020 nm spectral range.
12 nm - 500 um
370 nm - 1700 nm
Halogen (internal)
Table-top system
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3 Versions:
FR-ES 900 - 1700 nm spectral rangeFR-ES 850 - 1050 nm spectral rangeFR-ES 370 - 1020 nm spectral range
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FR-Ultra
FR-Ultra
Single Point Measurement
POLOS
FR-Ultra
10 μm – 2 mm
380 nm - 1350 nm
SLED (internal) or Tungsten
Table-top system
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2 Versions:
FR-Ultra NIR-N3FR-Ultra VIS/NIR
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FR-Scanner
FR-Scanner
Wafer Mapping
POLOS
FR-Scanner
FR-Scanner is a compact bench-top tool for the automatic characterization of films and coatings on wafers, masks or other substrates. It is ideal for the fast a
3 nm to 100 um
200 nm - 1020 nm
Tabletop System
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2 Versions:
FR-Scanner UV/VIS spectral rangeFR-Scanner VIS/NIR spectral range
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FR-Scanner All-In-One-Mic-XY200
FR-SCANNER-AIO-MIC-XY200
Wafer Mapping
POLOS
FR-Scanner All-In-One-Mic-XY200
4 nm - 150 μm
200 nm - 1700 nm
2000 h
Table-top system
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FR-Scanner All-In-One-Mic-XY300
FR-SCANNER-AIO-MIC-XY300
Wafer Mapping
POLOS
FR-Scanner All-In-One-Mic-XY300
4 nm - 150 μm
200 nm - 1700 nm
2000 h
Table-top system
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