When it comes to spin process applications, the possibilities are endless. Where today’s requirements may stop at a simple clean & rinse program on a 4” substrate, tomorrow’s process may require mask cleaning, or a coating step for fragments. The POLOS® coating systems offer the right solution to your current and future applications.
SPS Europe B.V.
+31 341 360 590
SPS America Inc.
+1 503 502-5722
SPS Asia Technology Pte Ltd.
+65 911 30 172
POLOS provides high-end equipment for the Semiconductor, Life Science, food, laboratories and pharmaceutical industries especially targeted to support; Universities, R&D institutes and small production facilities. Our portfolio consists of user-friendly and highly durable systems, mainly within the Photolithography and dispositioning process area. POLOS was established in 2003, with the start of our first product line; the Single Wafer Spin Coating Systems. As of today, over 4.000 units of these systems have been sold worldwide. Over the years, we have been fortunate to introduce many other new POLOS products. We carefully develop our equipment, based on long-term experience and user feedback, to support your process.
