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Category
ALD
(5)Accessories & Options
(1)Max. substrate size
2"
4"
6"
Max. temperature
Up to 300°C
Up to 330°C
Up to 400°C
System type
Bench-top System
Table-top System
ALD
POLOS® offers various Deposition systems. The table-top Atomic Layer Deposition or ALD systems are invaluable tools for solving problems and creating devices at the nano-scale. Our systems are suitable for up to 5 lines.
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Category
ALD
(5)Accessories & Options
(1)Max. substrate size
2"
4"
6"
Max. temperature
Up to 300°C
Up to 330°C
Up to 400°C
System type
Bench-top System
Table-top System
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Webshop
AT200
ALD
Algemeen
2"
Up to 300°C
Table-top System
Webshop
AT410
ALD
Algemeen
4"
Up to 330°C
Table-top System
Webshop
AT610
ALD
Algemeen
6"
Up to 330°C
Table-top System
Webshop
AT650P
ALD
Algemeen
6"
Up to 400°C
Bench-top System
Webshop
AT650T
ALD
Algemeen
6"
Up to 400°C
Bench-top System