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Max. substrate size
2"
4"
6"
Max. temperature
Up to 250°C
Up to 330°C
System type
Table-top System

ALD

POLOS® offers various Deposition systems. The table-top Atomic Layer Deposition or ALD systems are invaluable tools for solving problems and creating devices at the nano-scale. Our systems are suitable for up to 5 lines. 

3products
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ALD
Webshop
AT200
ALD
Algemeen
AT200 ALD System

Webshop » Deposition » ALD
2"
Up to 250°C
Table-top System
Webshop
AT410
ALD
Algemeen
AT410 ALD System

Webshop » Deposition » ALD
4"
Up to 330°C
Table-top System
Webshop
AT610
ALD
Algemeen
AT610 ALD System

Webshop » Deposition » ALD
6"
Up to 330°C
Table-top System