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Category
Max. substrate size
2"
4"
6"
Max. temperature
Up to 250°C
Up to 330°C
System type
Table-top System
ALD
POLOS® offers various Deposition systems. The table-top Atomic Layer Deposition or ALD systems are invaluable tools for solving problems and creating devices at the nano-scale. Our systems are suitable for up to 5 lines.
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ALD
Deposition
Refine
Category
Max. substrate size
2"
4"
6"
Max. temperature
Up to 250°C
Up to 330°C
System type
Table-top System