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ALD
POLOS® offers various Deposition systems. The table-top Atomic Layer Deposition or ALD systems are invaluable tools for solving problems and creating devices at the nano-scale. Our systems are suitable for up to 5 lines.
ALD
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SPS Europe B.V.
+31 341 360 590
SPS America Inc.
+1 503 502-5722
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+65 911 30 172
POLOS - About us
POLOS provides high-end equipment for the Semiconductor and Life Science industry especially targeted to support; Universities, R&D institutes and small production facilities. Our portfolio consists of user-friendly and highly durable systems, mainly within the Photolithography and dispositioning process area. POLOS was established in 2003, with the start of our first product line; the Single Wafer Spin Coating Systems. As of today, over 4.000 units of these systems have been sold worldwide. Over the years, we have been fortunate to introduce many other new POLOS product lines. We carefully select our equipment, based on long-term experience and user feedback, to support your process.
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