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4"
6"
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Bench-top System
Table-top System

ALD

POLOS® offers various Deposition systems. The table-top Atomic Layer Deposition or ALD systems are invaluable tools for solving problems and creating devices at the nano-scale. Our systems are suitable for up to 5 lines. 

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AT200
ALD
Algemeen
AT200 ALD System
2"
Up to 300°C
Table-top System
Webshop
AT410
ALD
Algemeen
AT410 ALD System
4"
Up to 330°C
Table-top System
Webshop
AT610
ALD
Algemeen
AT610 ALD System
6"
Up to 330°C
Table-top System
Webshop
AT650P
ALD
Algemeen
AT650P ALD System
6"
Up to 400°C
Bench-top System
Webshop
AT650T
ALD
Algemeen
AT650T ALD System
6"
Up to 400°C
Bench-top System