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Material
Table-top System
Thickness range
15 nm to 100 um
3 nm to 80 um
Spectral range
200 nm - 850 nm
370 nm - 1020 nm
Light Source MTBF
2,000 h
5,000 h

Wafer Mapping

Automated, ultra-fast & accurate wafer mapping; these tools are ideal for the fast and accurate mapping of film properties: thickness, refractive index, uniformity, color and more.

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Wafer Mapping
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FR-Scanner
Wafer Mapping
POLOS
FR-Scanner
35235.2

Webshop » Layer Thickness Measurement » Wafer Mapping
FR-Scanner is a compact bench-top tool for the automatic characterization of films and coatings on wafers, masks or other substrates. It is ideal for the fast a
3 nm to 100 um
200 nm - 1020 nm
Tabletop System
2 Versions:
FR-Scanner UV/VIS spectral range
35235.2

Webshop » Layer Thickness Measurement » Wafer MappingFR-Scanner VIS/NIR spectral range
37752

Webshop » Layer Thickness Measurement » Wafer Mapping