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Manual Mask Aligners
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Semi-Automatic Mask Aligners
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Max. substrate size
200 mm (Up to 8")
300 mm (Up to 12")
Model
Full automatic
Light source
1000W UV lamp
5 kW UV lamp
System type
Stand-alone system

Full-Automatic Mask Aligners

Our fully-automatic mask aligners are specially designed for university and research institutes. They offer a higher alignment accuracy and a more flexible process of all applications. They represent the next generation of full-field lithography systems. 

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MDA-12FA
Full-Automatic Mask Aligners
MIDAS
POLOS MDA-12FA - 12" Mask Aligner
The brand new MDA-12FA represents the next generation of Full-Field lithography systems. It's great for Ceramic, Probe Card and WLP applications.
300 mm (Up to 12")
Full automatic
5 kW UV lamp
Stand-alone system
Webshop
MDA-80FA
Full-Automatic Mask Aligners
MIDAS
POLOS MDA-80FA - 8" Mask Aligner
The brand new MDA-80FA represents the next generation of Full-Field lithography systems. It's great for Ceramic, Probe Card and WLP applications.
200 mm (Up to 8")
Full automatic
1000W UV lamp
Stand-alone system