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200 mm (Up to 8")
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1000W UV lamp
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Full-Automatic Mask Aligners
Our fully-automatic mask aligners are specially designed for university and research institutes. They offer a higher alignment accuracy and a more flexible process of all applications. They represent the next generation of full-field lithography systems.
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Max. substrate size
200 mm (Up to 8")
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Full automatic
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1000W UV lamp
5 kW UV lamp
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Stand-alone system
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MDA-12FA
Full-Automatic Mask Aligners
MIDAS
The brand new MDA-12FA represents the next generation of Full-Field lithography systems. It's great for Ceramic, Probe Card and WLP applications.
300 mm (Up to 12")
Full automatic
5 kW UV lamp
Stand-alone system
Webshop
MDA-80FA
Full-Automatic Mask Aligners
MIDAS
The brand new MDA-80FA represents the next generation of Full-Field lithography systems. It's great for Ceramic, Probe Card and WLP applications.
200 mm (Up to 8")
Full automatic
1000W UV lamp
Stand-alone system