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Category
Single Point Measurement
(4)Wafer Mapping
(2)Thickness range
1 nm to 120 μm
1 nm to 80 μm
1 um - 500 um
100 nm to 150 μm
12 nm - 100 um
12 nm to 90 μm
15 nm to 150 μm
15 nm to 90 μm
3 nm to 80 μm
4 nm to 100 μm
4 nm to 150 μm
4 nm to 60 μm
4 nm to 70 μm
4 um to 1 mm (SiO2) 400um max (Si)
50 nm - 250 um
Spectral range
190 nm - 1000 nm
190 nm - 1100 nm
190 nm - 1700 nm
200 nm - 1000 nm
200 nm - 1020 nm
200 nm - 1100 nm
200 nm - 1700 nm
200 nm - 850 nm
370 nm - 1020 nm
370 nm - 1700 nm
380 nm - 1000 nm
380 nm - 1020 nm
850 nm - 1050 nm
900 nm - 1050 nm
900 nm - 1700 nm
Light Source MTBF
2,000 h
20,000 h
3000h (Not included!)
Balanced Deuterium & Halogen (internal) (Not included!)
Halogen (internal)
System type
Portable system
Table-top system
Single Point Measurement
Unique miniaturized solutions for accurate & precise non-destructive layer thickness measurement of transparent and semi-transparent single films or stack of films. Guaranteed highly accurate and repeatable measurements.
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Layer Thickness Measurement
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Category
Single Point Measurement
(4)Wafer Mapping
(2)Thickness range
1 nm to 120 μm
1 nm to 80 μm
1 um - 500 um
100 nm to 150 μm
12 nm - 100 um
12 nm to 90 μm
15 nm to 150 μm
15 nm to 90 μm
3 nm to 80 μm
4 nm to 100 μm
4 nm to 150 μm
4 nm to 60 μm
4 nm to 70 μm
4 um to 1 mm (SiO2) 400um max (Si)
50 nm - 250 um
Spectral range
190 nm - 1000 nm
190 nm - 1100 nm
190 nm - 1700 nm
200 nm - 1000 nm
200 nm - 1020 nm
200 nm - 1100 nm
200 nm - 1700 nm
200 nm - 850 nm
370 nm - 1020 nm
370 nm - 1700 nm
380 nm - 1000 nm
380 nm - 1020 nm
850 nm - 1050 nm
900 nm - 1050 nm
900 nm - 1700 nm
Light Source MTBF
2,000 h
20,000 h
3000h (Not included!)
Balanced Deuterium & Halogen (internal) (Not included!)
Halogen (internal)
System type
Portable system
Table-top system
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FR-pOrtable
Single Point Measurement
POLOS
FR-pOrtable is a unique, miniaturized, turn-key solution for accurate & precise non-destructive optical characterization of transparent and semi-transparent
12 nm to 90 μm
380 nm - 1020 nm
20,000 h
Portable system
Webshop
FR-pRo
Single Point Measurement
POLOS
FR-pRo is a modular and expandable platform for the characterization of coatings in the 1 nm - 1 mm thickness range. It is used in a wide range of applications
1 nm to 120 μm
190 nm - 1100 nm
Table-top System
Webshop
FR-ES
Single Point Measurement
POLOS
Compact and light-weighted unit for the characterization of coatings. Perform reflectance and transmittance measurements in the 370 - 1020 nm spectral range.
12 nm - 500 um
370 nm - 1700 nm
Halogen (internal)
Table-top system