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Single Point Measurement
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Wafer Mapping
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Material
Portable System
Table-top System
Tabletop System
Thickness range
1 nm to 120 μm
1 nm to 80 μm
1 um - 500 um
100 nm to 150 μm
12 nm - 100 um
12 nm to 90 μm
15 nm to 150 μm
15 nm to 90 μm
3 nm to 80 μm
4 nm to 100 μm
4 nm to 150 μm
4 nm to 60 μm
4 nm to 70 μm
4um to 1 mm (SiO2) 400um max (Si)
50 nm - 250 um
Spectral range
190 nm - 1000 nm
190 nm - 1100 nm
190 nm - 1700 nm
200 nm - 1000 nm
200 nm - 1020 nm
200 nm - 1100 nm
200 nm - 1700 nm
200 nm - 850 nm
370 - 1020 nm
370 nm - 1020 nm
370 nm - 1700 nm
380 nm - 1000 nm
380 nm - 1020 nm
850 - 1050 nm
900 - 1700 nm
900 nm - 1050 nm
900 nm - 1700 nm
Light Source MTBF
2,000 h
20,000 h
3000h (Not included!)
Balanced Deuterium & Halogen (internal) (Not included!)
Halogen (internal)

Single Point Measurement

Unique miniaturized solutions for accurate & precise non-destructive layer thickness measurement of transparent and semi-transparent single films or stack of films. Guaranteed highly accurate and repeatable measurements.

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FR-ES
FR-ES
Single Point Measurement
POLOS
FR-ES
Compact and light-weighted unit for the characterization of coatings. Perform reflectance and transmittance measurements in the 370 - 1020 nm spectral range.
12 nm - 500 um
370 nm - 1700 nm
Halogen (internal)
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3 Sizes:
FR-ES 900 - 1700 nm spectral rangeFR-ES 850 - 1050 nm spectral rangeFR-ES 370 - 1020 nm spectral range
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FR-Mic
FR-Mic
Single Point Measurement
POLOS
FR-Mic
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8 Sizes:
FR-Mic 200 nm - 1020 nm spectral rangeFR-Mic 200 nm - 1100 nm spectral rangeFR-Mic 200 nm - 1700 nm spectral range
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FR-pOrtable
FR-pOrtable
Single Point Measurement
POLOS
FR-pOrtable
FR-pOrtable is a unique, miniaturized, turn-key solution for accurate & precise non-destructive optical characterization of transparent and semi-transparent
12 nm to 90 μm
380 nm - 1020 nm
20,000 h
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FR-pRo
FR-pRo
Single Point Measurement
POLOS
FR-pRo
FR-pRo is a modular and expandable platform for the characterization of coatings in the 1 nm - 1 mm thickness range. It is used in a wide range of applications
1 nm to 120 μm
190 nm - 1100 nm
Tabletop System
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6 Sizes:
FR-pRo 380 nm - 1000 nm spectral rangeFR-pRo 190 nm - 1700 nm spectral rangeFR-pRo 190 nm - 1000 nm spectral range
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