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Material
Stand-alone System
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Max. substrate size
Up to 12" (450mm)
Up to 6" (150 mm)
Up to 8" (200 mm)
System type
Semi Automatic
Light source
1000W UV Lamp
2-5 kW UV Lamp
350W UV Lamp

Semi-Automatic Mask Aligners

Our semi-automatic mask aligners are specially designed for university and research institutes. They offer a higher alignment accuracy and a more flexible process of all applications, with a small foorprint. They represent the next generation of full-field lithography systems. 

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Semi-Automatic Mask Aligners
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POLOS MDA-12SA - 12" Mask Aligner
MDA-12SA
Semi-Automatic Mask Aligners
MIDAS
POLOS MDA-12SA - 12" Mask Aligner 592561.2 Webshop » Mask Aligners » Semi-Automatic Mask Aligners
The brand new MDA-12SA represents the next generation of Full-Field lithography systems. It offers a more reliable operation, higher Overlay Accuracy, higher pr
Up to 12" (450mm)
Semi Automatic
2-5 kW UV Lamp
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Webshop
POLOS MDA-600S - 6" Mask Aligner
MDA-600S
Semi-Automatic Mask Aligners
MIDAS
POLOS MDA-600S - 6" Mask Aligner 266200 Webshop » Mask Aligners » Semi-Automatic Mask Aligners
The semi-automatic bench top mask aligner MDA-600S provides a higher performance of alignment accuracy and resolution. It is an ideal and economical tool for Un
Up to 6" (150 mm)
Semi Automatic
350W UV Lamp
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Webshop
POLOS MDA-80MS - 8" Mask Aligner
MDA-80MS
Semi-Automatic Mask Aligners
MIDAS
POLOS MDA-80MS - 8" Mask Aligner 261232.95 Webshop » Mask Aligners » Semi-Automatic Mask Aligners
The MDA-80MS offers a higher alignment accuracy and more flexible process of all applications. This stabilized system can reliably process substrates up to 8&am
Up to 8" (200 mm)
Semi Automatic
1000W UV Lamp
View product