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Manual Mask Aligners
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Semi-Automatic Mask Aligners
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Max. substrate size
150 mm (Up to 6")
200 mm (Up to 8")
300 mm (Up to 12")
Model
Semi automatic
Light source
1000W UV lamp
2-5 kW UV lamp
350W UV lamp
System type
Stand-alone system
Table-top system

Semi-Automatic Mask Aligners

Our semi-automatic mask aligners are specially designed for university and research institutes. They offer a higher alignment accuracy and a more flexible process of all applications, with a small foorprint. They represent the next generation of full-field lithography systems. 

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POLOS MDA-12SA - 12" Mask Aligner
MDA-12SA
Semi-Automatic Mask Aligners
MIDAS
POLOS MDA-12SA - 12" Mask Aligner
The brand new MDA-12SA represents the next generation of Full-Field lithography systems. It offers a more reliable operation, higher Overlay Accuracy, higher pr
300 mm (Up to 12")
Semi automatic
2-5 kW UV lamp
Stand-alone system
View product
Webshop
POLOS MDA-600S - 6" Mask Aligner
MDA-600S
Semi-Automatic Mask Aligners
MIDAS
POLOS MDA-600S - 6" Mask Aligner
The semi-automatic bench top mask aligner MDA-600S provides a higher performance of alignment accuracy and resolution. It is an ideal and economical tool for Un
150 mm (Up to 6")
Semi automatic
350W UV lamp
Table-top system
View product
Webshop
POLOS MDA-80MS - 8" Mask Aligner
MDA-80MS
Semi-Automatic Mask Aligners
MIDAS
POLOS MDA-80MS - 8" Mask Aligner
The MDA-80MS offers a higher alignment accuracy and more flexible process of all applications. This stabilized system can reliably process substrates up to 8&am
200 mm (Up to 8")
Semi automatic
1000W UV lamp
Table-top system
View product