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MIDAS

POLOS MDA-80FA - 8" Mask Aligner

POLOS MDA-80FA - 8" Mask Aligner

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Product description

The brand new MDA-80FA represents the next generation of Full-Field lithography systems. This model offers a Full Automatic Mask Aligner platform with a higher Overlay Accuracy and more reliable operation than conventional systems. It is great for LED. The MDA-80FA offers higher productivity and user friendly controls.

Benefits

  • Easy operation
  • PC Operation with PLC control
  • Image grab & Data log
  • More than 100 Program recipes
  • Microscope position control system
  • Auto Align mark searching function
MIDAS

POLOS MDA-80FA - 8" Mask Aligner

Higher Overlay Accuracy and more reliable operation than conventional systems
For LED applications
Higher productivity and user friendly controls
More than 100 Program recipes

Specifications

Brand
MIDAS
Product Number
MDA-80FA
Max. substrate size
200 mm (Up to 8")
Model
Full automatic
Light source
1000W UV lamp
System type
Stand-alone system
Status
Request information

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