The MDA-80FA represents the latest advancement in full-field lithography systems. This fully automatic mask aligner delivers superior overlay accuracy and more reliable performance than traditional systems, making it ideal for LED fabrication and other precision applications. Designed for enhanced productivity, the MDA-80FA combines high performance with intuitive, user-friendly operation.
Key benefits
- Simple and efficient operation for faster workflows
- PC-based control with integrated PLC automation
- Image capture and data logging for process traceability
- Supports over 100 programmable recipe settings
- Microscope position control for precise inspection
- Auto align mark search function for rapid alignment



