The MDA-12FA sets a new standard in full-field lithography systems. This fully automatic mask aligner delivers enhanced overlay accuracy and dependable performance, outperforming conventional platforms. It is ideally suited for applications such as ceramic substrates, probe cards, and wafer-level packaging (WLP), providing higher throughput and intuitive, user-friendly operation.
Key benefits
- PC-based control with integrated PLC for reliable automation
- Image capture and data logging for process documentation
- Motorized joystick for precise alignment adjustments
- Microscope position control for accurate inspection
- Supports ceramic substrates for bump applications



