The POLOS® FR-Scanner is a compact, bench-top system designed for automated, high-precision characterization of thin films and coatings on wafers, masks, or other substrates. It delivers rapid, reliable mapping of film properties such as thickness, refractive index, uniformity, and color. The system can accommodate wafers of any shape up to 300 mm in diameter using a vacuum chuck.
Fast, accurate scanning
FR-Scanner combines radial rotation with linear motion (polar coordinate scanning) to measure coatings with exceptional speed and precision. This ensures highly repeatable reflectance data, making it an ideal solution for at-line or in-line inspection in processing environments. The system supports a wide range of film thicknesses, from just a few nanometers up to several hundred micrometers, and comes with dedicated software optimized for daily routine use.
Key advantages
- High accuracy, precision, and long-term stability
- Single-click analysis: no initial guesses required
- Real-time dynamic measurements
- Optical constants (n & k) and color characterization included
- Video and image capture for presentations
- Supports 600+ different materials
- Configurable for offline or integrated installations
- Free software updates
Applications across industries
- Semiconductor manufacturing: photoresists, dielectrics, poly-Si, a-Si, DLC, photonic multilayers
- Photovoltaics (PV) industry
- Academic and research laboratories
- Life sciences and biomedical coatings
- Liquid crystal display (LCD) production
- Optical coatings
- Polymers, MEMS, and MOEMS
- Compatible with transparent and semi-transparent substrates (glass, quartz, etc.)
How it works
The FR-Scanner uses White Light Reflectance Spectroscopy (WLRS) to measure the intensity of light reflected from a single layer or multilayer stack over a defined spectral range. Interference patterns from the individual interfaces are analyzed to determine film thickness, refractive index (n & k), and other optical properties. The system works for both free-standing films and coatings on partially or fully reflective substrates.
