Spin processing

Unlock precision and flexibility with the POLOS® SPINx spin processor

Designed for innovators, the POLOS® SPINx-series delivers exceptional precision and repeatability for your critical processes. Whether you're in MEMS, semiconductors, life sciences, photovoltaics, or microfluidics, this advanced spin processor empowers your research and low-volume production with reliable, high-quality performance.

Crafted from durable natural polypropylene (NPP) or chemically resistant PTFE, the SPINx-series is built to withstand demanding environments. Available in both Standard and Advanced models, it offers the versatility to handle a wide range of applications — from cleaning and rinse/dry to coating, developing, etching, and more.

With 4 size models to choose from, the SPINx-series has the capability to process substrates up to 450 mm round or 300 x 300 mm square, making this tool your go-to solution for maximum flexibility and control in every spin process.

 

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Optimized for automation and precision handling

The SPINx-series is engineered with automation in mind. Its innovative chamber design features a raised vacuum chuck, providing easy access for robotic end-effectors, vacuum wands, or tweezers — streamlining both manual and automated wafer handling. Combined with customizable motor homing positions, it ensures precise alignment and seamless integration into robot-controlled systems. The result: faster setup, improved consistency, and a more efficient workflow in high-precision environments.

 

 

 

 

 

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Smart Lid Control for seamless operation

The automated lid functionality allows you to open and close the chamber via the user interface or a foot pedal — ideal for glovebox setups and hands-free workflows. Plus, you can program the lid to open automatically at the end of your recipe for smoother batch transitions.

 

 

 

 

 

 

 

 

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Built-in Liquid Filter Trap

Safeguard your spin processor with the integrated liquid filter trap, which captures excess resist or liquids before they reach sensitive components. The transparent cut-out allows for quick visual checks and easy maintenance, minimizing downtime.

 

 

 

 

 

 

 

 

 

Flexible, modular design for maximum versatility

From table-top to in-deck configuration, the SPINx-series adapts to your lab. We have 4 size models available: 150 mm, 200 mm, 300 mm and 450 mm, the SPINx-series can handle them all. Its flexible design supports a wide range of accessories for tailored dispensing and enhanced handling — enabling you to scale and evolve with your process needs.

 

 

 

 

 

 

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Discover high-performance spin processors engineered for precision and reliability. POLOS® systems are user-friendly, durable, and customizable to your needs. Get in touch today to configure your ideal spin process solution.