The POLOS® 450 Advanced Single-Substrate Spin Processor is a high-performance desktop system designed for reliable coating, rinsing, cleaning, and drying processes. Featuring a robust NPP housing, precision spin cup, and heavy-duty motor, the system delivers stable, repeatable results across a wide range of applications.
Its aerodynamically optimized chamber promotes excellent coating uniformity, while the process area ensures a clean, contamination-free environment that is easy to maintain. The process area itself is manufactured from high-grade Natural Polypropylene or, optionally Stainless Steel. All systems support programmable clockwise and counter-clockwise rotation as well as puddle mode, providing full control over process dynamics.
The POLOS® 450 Advanced is particularly well-suited for drying, rinse/cleaning, and automated coating workflows where flexibility and repeatability are essential.
Specifications:
- Substrate capacity:
- Up to 500 mm round
- Up to 350 × 350 mm square
- Construction material:
- High-grade Natural Polypropylene (tool body and all wetted surfaces)
- Dispensing:
- Manual chemical dispense
- Two automatic static dispense lines
- Pneumatic lid opening and closing
- Chuck adapter with one vacuum chuck supporting up to three wafer sizes
- Maximum rotation speed: 1,500 RPM
- Automatic chemical dispense sequencing (sequential or parallel)
- Transparent lid with six injector assemblies positioned around the center
- Each injector independently programmable
- Clockwise & counter-clockwise rotation with puddle mode
- Detachable color touchscreen with customizable icons
- Standard 1" drain connection
- Precision digital motor controller (up to 1,500 RPM
- Separate module for housing six peristaltic pumps
