MIDAS

POLOS MDA-600S - 6" Mask Aligner

POLOS MDA-600S - 6" Mask Aligner

Product description

The MDA-600S is widely used for MEMS, LED and Semiconductor industry. It can provide a higher performance of alignment accuracy and resolution. It is an ideal and economical tool for Universities and Research Centers. For users of both thick high aspect ratio photoresists and thin high resolution photoresists: The MDA-600S can process from 0.8 um and high aspect ratio PR to approximately 170 um thickness without additional optics. That should suit users varying needs, without any system changes.

The Model MDA-600S is a semi-automatic bench top mask aligner that requires only a square meter of your cleanroom space. (1256 x 1151 x 1600 mm (W*D*H) ). It offers an economic alternative for R&D, or small-scale pilot production. It has a semi- automatic mask aligner system for 6” features auto exposure, leveling and Z-axis stage motion. The loading, unloading and aligning of your wafer is done manually.

The alignment module incorporates micrometers for X, Y, and Z-axis. Alignment accuracy is ± 0.5 µm.
This mask aligner is a flexible, economic solution for any entry-level mask alignment and UV exposure application.

Options

  • Back-side Alignment Module (CCD camera)
    (Optional CCD Optical BSA uses CCD camera only!)
  • Nanoimprint Kit
MIDAS

POLOS MDA-600S - 6" Mask Aligner

Higher performance of alignment accuracy and resolution
Ideal and economical tool for Universities and Research Centers
Requires only a square meter of your cleanroom space
Features auto exposure, leveling and Z-axis stage motion

Specifications

Brand
MIDAS
Product Number
MDA-600S
Material
Table-top System
Max. substrate size
Up to 6" (150 mm)
System type
Semi Automatic
Light source
350W UV Lamp
Status
Request information

Options

Webshop
3080S
Complementary Equipment
POLOS
Ionizing Pen - Model 3080
Quickly and easily, remove dust that adheres to surfaces such as silicon wafers and masks. This device is an ideal tool to clean parts and assemblies.
Remove static electricity on a material or object.
Ø1.5 mm air outlet
Pressure speed control is adjustable
Webshop
UV-MTR
Complementary Equipment
POLOS
UV Intensity Meter (365nm)
The UV Intensity meter represents next generation of full-field UV Intensity meter systems. The sensor and probes are fully digital, so no calibration is needed
Suitable for measuring 365 nm (UV I-Line)
0 ~ 999.99 mW/cm2 intensity
Hand-held