POLOS

POLOS UC330 Ultrasonic Spray Coating System

POLOS UC330 Ultrasonic Spray Coating System

Product description

The POLOS® UC330 is a compact, tabletop ultrasonic spray coating system developed for high-accuracy coating tasks in R&D environments and low-volume production. It is ideally suited for applications such as photoresist deposition on a wide range of wafer materials, as well as the formation of functional and thin-film layers where uniformity and material control are critical.

High efficiency, minimal material waste

By leveraging advanced ultrasonic spray technology, the UC330 achieves highly controlled nanoparticle deposition while significantly reducing chemical consumption. Material utilization rates above 95% help lower photoresist usage, reduce operating costs, and improve overall process efficiency compared to conventional coating techniques.

Designed around user flexibility

The UC330 combines a small footprint with intuitive software control, making it easy to operate and integrate into existing workflows. A broad selection of ultrasonic nozzles and optional accessories allows the system to be configured precisely to match specific application requirements, ensuring optimal coating performance across different processes.

Integrated, ready-to-use platform

Supplied as a complete system, the POLOS® UC330 includes an integrated syringe pump, carrier gas control, ultrasonic generator, and a programmable motion system. Its patented ultrasonic spray technology delivers a fine, stable spray pattern for highly uniform coatings, even on complex or structured surfaces.

POLOS

POLOS UC330 Ultrasonic Spray Coating System

Highly precision nano-particle coating
More efficient photoresist consumption compared to standard photoresist application techniques
Compact system with easy-to-use software controls
Wide range of Ultrasonic Nozzles and complimentary options

Specifications

Brand
POLOS
Product Number
POLOS UC330
Substrate size
Max. spray area: 300 mm x 300 mm
Model
Spray width: 1 mm to 100 mm
System type
Benchtop model
Status
Request information