The POLOS® UC320 is a compact tabletop ultrasonic spray coating system designed for high-accuracy coating tasks in research environments and low-volume production. It is ideally suited for applying photoresists to a wide variety of wafer materials, as well as for depositing functional thin-film layers where uniformity and material efficiency are critical.
High-efficiency coating with minimal material waste
By leveraging advanced ultrasonic atomization, the UC320 enables precise nanoparticle deposition while dramatically reducing material consumption. With transfer efficiencies exceeding 95%, the system helps lower chemical usage and operational costs compared to conventional coating techniques, without compromising coating quality or repeatability.
Flexible, user-focused design
Developed with customer input, the UC320 combines a space-saving footprint with intuitive software control. Users can select from a broad range of ultrasonic nozzles and optional accessories, allowing the system to be easily configured for specific materials, coating widths, and flow rates. This flexibility ensures optimal performance across a wide range of process requirements.
Integrated, ready-to-use platform
The POLOS® UC320 is delivered as a complete, fully integrated solution. Standard features include a precision syringe pump, controlled carrier gas supply, ultrasonic generator, and a programmable motion system. The patented ultrasonic spray technology produces a fine, highly uniform spray, enabling consistent coating results even on complex or sensitive substrates.
