FR-Ultra is a unit dedicated for the fast, accurate and non-destructive measurement of thick and ultra-thick semiconductor and transparent layers.
FR-Ultra is a dedicated tool for the accurate measurement of thick and ultra-thick layers from semiconducting and/or dielectric materials. Thanks to its advanced optics, FR-Ultra can measure either smooth or rough films & substrates of very high thickness.
Typical applications include:
- Thickness measurement of thick glasses (up to 2 mm in thickness either clear or haze)
- Thickness measurement of wafers (e.g. Single or Double Side Polished wafers up to 12 inch in diameter).
- FR-Ultra can be easily integrated with Cartesian and Polar stages for thickness mapping over large areas.
Features
- Single-click analysis (no need for initial guess)
- Dynamic measurements
- 800+ materials
- Multiple installations for offline analysis
- Free of-charge Software update
Applications
- Univ. & Research labs
- Semiconductors
- Polymer & Resist characterization
- Dielectric characterizations
- Hardcoat, Anodization,
- And many more… (contact us with your requirements)
