EPAK

8" (200 mm) ePOD-PRO SMIF POD

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Product description

Standard mechanical interface POD

8" (200 mm)
SEMI/FIMS compliant
Automated operation minimizes potential contamination from human interaction
Automation opening and closing
Ultrapure, low outgassing materials protect wafers
Robust wafer retention ensures reduced particle generation
Wide application range and strong universality.
Shrapnel structure is easy to install and disassemble.

EPAK

8" (200 mm) ePOD-PRO SMIF POD

SEMI/FIMS compliant

Automation opening and closing

Ultrapure, low outgassing materials

Robust wafer retention

Specifications

Brand

EPAK

Product Number

eWB0680-ASSY-1

Size

8" (200 mm)

Status

Request information

Our Products & Services

Connect with us

SPS Europe B.V.
+31 341 360 590

SPS America Inc.
+1 503 502-5722

SPS Asia Technology Pte Ltd.
+65 911 30 172

sales@sps-polos.com

POLOS - About us

POLOS provides high-end equipment for the Semiconductor, Life Science, food, laboratories and pharmaceutical industries especially targeted to support; Universities, R&D institutes and small production facilities. Our portfolio consists of user-friendly and highly durable systems, mainly within the Photolithography and dispositioning process area. POLOS was established in 2003, with the start of our first product line; the Single Wafer Spin Coating Systems. As of today, over 4.000 units of these systems have been sold worldwide. Over the years, we have been fortunate to introduce many other new POLOS products. We carefully develop our equipment, based on long-term experience and user feedback, to support your process.