POLOS

POLOS SPIN150i

POLOS SPIN150i
5263.5

Webshop » Coating » Spin Coaters

Product description

The POLOS SPIN150i is a versatile and high-quality substrate spin coater, made of PTFE or NPP. It is specifically designed for R&D and low volume production. There's a desktop version for manual or automated (optional) chemical dispense. The In-Deck version is suitable for easy integration in your existing or new wetbench.
Suitable for Coating, Cleaning, Rinse/Dry, Developing, Etching, PDMI, and other processes

Specifications:

  • Up to 6" (150 mm) Wafers
  • Up to 4" x 4" (100 mm) square Substrates
  • Material: Natural Polypropylene (NPP)
  • Easy, step- by- step recipe programming via large colour touchscreen
  • Transparent Lid with syringe holder for central dispensing
  • Electro-magnetic safety lid lock
  • N2 diffuser for N2 purge during process
  • 12.000 RPM (Depending on Substrate / Chuck)
  • High Acceleration and Accuracy
  • Manual Chemical Dispense
  • CW & CCW Rotation
  • (Detachable) Colour Touchscreen with Customisable Icons
  • Unlimited Program Storage for recipes with multiple steps each
  • USB Port


Including

  • 1 x A-V36-S45-NPP-HD Vacuum Chuck
  • 1 x D-V10-S50-NPP-HD Fragment Adapter
POLOS

POLOS SPIN150i

Choose your size:
Easy, step- by- step recipe programming via large colour touchscreen
Transparent Lid with syringe holder for central dispensing
High Acceleration and Accuracy
Manual Chemical Dispense

Specifications

Brand
POLOS
Product Number
POLOS-SPIN150i
Material
Natural Polypropylene (NPP) or PTFE
Substrate size
Ø150 mm or 4" x 4" square substrates
Model
Desktop or Integrator
System Type
Standard Series
Status
Request information

Options

Webshop
SPIN150i-LNR
Accessories & Options
POLOS
Liners for SPIN150i (consists of 20 sets)
301.048

Webshop » Coating » Accessories & Options
Liners are available in PET (Polyethylene terephthalate). 0.5 mm thick, transparent, antistatic (108 - 1010 Ω) to prevent possible build-up of stat
For model SPIN150i
Thickness: 0.5 mm
Consists of 20 sets of lid and bowl liners
Webshop
37819
Accessories & Options
POLOS
Centering Aid (For 150 mm)
416.1916

Webshop » Coating » Accessories & Options
Centering Aid for easy and accurate alignment of your substrate. For use with the POLOS SPIN150i spin coaters.
2" up to 6"
For use with POLOS SPIN150i
N/A
Webshop
SHSK
Accessories & Options
POLOS
Syringe Holder Starter Kit
235.95

Webshop » Coating » Accessories & Options
Syringe Holder Starter Kit for thick, pastes or thin fluids. Including needles, pistons, barrel tips and barrel ends.
For thick and thin fluids
Includes 5 pieces of each tool
Set of the most commonly used parts
Webshop
VP-230V
Accessories & Options
POLOS
Vacuum Pump (Oil-less)
1005.5584

Webshop » Coating » Accessories & Options
VP-230 oil-less vacuum pump is a small footprint, lightweight pump wich is ideal for labratory applications.
Max air flow: 166 L/min
Frequency: 50 Hz
Max vacuum (abs): 80 mbar