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All wafer/mask handling

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Vacuum tip PEEK 100-200 mm compound/thin (WHS-V1)
WHS-V1-AP4C
Vacuum tips
Algemeen
Vacuum tip PEEK 100-200 mm compound/thin (WHS-V1)
Antistatic conductive PEEK vacuum wand tip for general handling of substrates in a cleanroom environment.
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5 Versions:
Vacuum tip PEEK 100-200 mm compound/thin (WHS-V1) 10° bent downVacuum tip PEEK 100-200 mm compound/thin (WHS-V1) 10° bent upVacuum tip PEEK 100-200 mm compound/thin (WHS-V1) 30° bent down
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Vacuum tip PEEK 100-200 mm (WHS-V1)
WHS-V1-AP4N
Vacuum tips
Algemeen
Vacuum tip PEEK 100-200 mm (WHS-V1)
The WHS-V1 Serie T794PKAS is antistatic conductive PEEK vacuum wand tip for general handling of substrates in a cleanroom environment.
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5 Versions:
Vacuum tip PEEK 100-200 mm (WHS-V1) 10° bent downVacuum tip PEEK 100-200 mm (WHS-V1) 10° bent upVacuum tip PEEK 100-200 mm (WHS-V1) 30° bent down
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Vacuum tip UHMW/PEEK 100-200 mm (WHS-V1)
WHS-V1-AP4U
Vacuum tips
Algemeen
Vacuum tip UHMW/PEEK 100-200 mm (WHS-V1)
The WHS-V1 Serie T693PKAS3 is antistatic conductive PEEK vacuum wand tip for general handling of substrates in a cleanroom environment.
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5 Versions:
Vacuum tip UHMW/PEEK 100-200 mm (WHS-V1) 10° bent downVacuum tip UHMW/PEEK 100-200 mm (WHS-V1) 10° bent upVacuum tip UHMW/PEEK 100-200 mm (WHS-V1) 30° bent down
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Vacuum tip 100-200 mm bonded/heavy (WHS-V1)
WHS-V1-AP5N
Vacuum tips
Algemeen
Vacuum tip 100-200 mm bonded/heavy (WHS-V1)
The WHS-V1 Serie T693PKAS3 is antistatic conductive PEEK vacuum wand tip for general handling of substrates in a cleanroom environment.
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5 Versions:
Vacuum tip 100-200 mm bonded/heavy (WHS-V1) 10° bent downVacuum tip 100-200 mm bonded/heavy (WHS-V1) 10° bent upVacuum tip 100-200 mm bonded/heavy (WHS-V1) 30° bent down
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Vacuum tip 300 mm (WHS-V1)
WHS-V1-AP6N
Vacuum tips
Algemeen
Vacuum tip 300 mm (WHS-V1)
The WHS-V1 Serie T3PKAS1 is antistatic conductive PEEK vacuum wand tip for general handling of substrates in a cleanroom environment. Features 50x75mm 3° o
300 mm
Press Fit
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5 Versions:
Vacuum tip 300 mm (WHS-V1) 10° bent downVacuum tip 300 mm (WHS-V1) 10° bent upVacuum tip 300 mm (WHS-V1) 20° Bent Down
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Mechanical wafer pick edge grip (WHS-G1)
WHS-G1
Wafer picks
Algemeen
Mechanical wafer pick edge grip (WHS-G1)
WHS-G1 Serie MCP2-8 A normally closed (consistent-Force) edge exclusion mechanical pick For handling 50 mm up to 200 mm round substrates from the wafer edge.
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4 Versions:
Mechanical wafer pick edge grip (WHS-G1) 50-76 mmMechanical wafer pick edge grip (WHS-G1) 100-125 mmMechanical wafer pick edge grip (WHS-G1) 150 mm
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Mechanical wafer pick edge grip with spatula (WHS-G2)
WHS-G2
Wafer picks
Algemeen
Mechanical wafer pick edge grip with spatula (WHS-G2)
WHS-G2 Serie MCP2-6-S A normally closed (consistent-Force) edge exclusion mechanical pick For handling 50 mm up to 200 mm round substrates from the wafer edge.
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4 Versions:
Mechanical wafer pick edge grip with spatula (WHS-G2) 50-76 mmMechanical wafer pick edge grip with spatula (WHS-G2) 100-125 mmMechanical wafer pick edge grip with spatula (WHS-G2) 150 mm
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3-point mechanical wafer gripper (WHS-G3)
WHS-G3
Wafer picks
Algemeen
3-point mechanical wafer gripper (WHS-G3)
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6 Versions:
3-point mechanical wafer gripper (WHS-G3) 12" (300 mm) PTFE3-point mechanical wafer gripper (WHS-G3) 2" (50mm) PTFE3-point mechanical wafer gripper (WHS-G3) 3" (76 mm) PTFE
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Mask pick - side grip (WHS-L1)
WHS-L1
Photomask handling
Algemeen
Mask pick - side grip (WHS-L1)
WHS-L1 Serie MPS2 A normally closed (consistent-force) mechanical pick for handling from 5" up to 9" square photomasks from the tangential edge to red
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6 Versions:
Mask pick - side grip (WHS-L1) 5x5x.0.090Mask pick - side grip (WHS-L1) 6x6x.120Mask pick - side grip (WHS-L1) 6x6x.250
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Mask pick - horizontal grip (WHS-L2)
WHS-L2
Photomask handling
Algemeen
Mask pick - horizontal grip (WHS-L2)
WHS-L2 Serie MPH2 A normally closed (consistent-force) mechanical pick for handling from 5" up to 9" square photomasks from the tangential edge to red
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6 Versions:
Mask pick - horizontal grip (WHS-L2) 5x5x.0.090 Photomasks and ReticlesMask pick - horizontal grip (WHS-L2) 6x6x.0.120 Photomasks and ReticlesMask pick - horizontal grip (WHS-L2) 6x6x.0.250 Photomasks and Reticles
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Process aluminum cassette BI-PITCH 13 slot flat slot-/thin wafer (WHS-M1)
WHS-M1-18077
Aluminum cassettes
Algemeen
Process aluminum cassette BI-PITCH 13 slot flat slot-/thin wafer (WHS-M1)
13-slots
Flat Slot
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5 Versions:
Process aluminum cassette BI-PITCH 13 slot flat slot-/thin wafer (WHS-M1) 76 mm (3”)Process aluminum cassette BI-PITCH 13 slot flat slot-/thin wafer (WHS-M1) 76 mm (3") with HandleProcess aluminum cassette BI-PITCH 13 slot flat slot-/thin wafer (WHS-M1) 100 mm (4") with Handle
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Process aluminum cassette, (AL, HC) 3" - 25 slot, angled slot (standard) (WHS-M1)
WHS-M1-5
Aluminum cassettes
Algemeen
Process aluminum cassette, (AL, HC) 3" - 25 slot, angled slot (standard) (WHS-M1)
The WHS-M1 Series MCF is an all aluminum 76 mm (3") 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C.
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3 Versions:
Process aluminum cassette, (AL, HC) 3" - 25 slot, angled slot (standard) (WHS-M1) standard: cover-plate (top), H-BAR (bottom)Process aluminum cassette, (AL, HC) 3" - 25 slot, angled slot (standard) (WHS-M1) cover-plate (top), H-BAR (bottom) with handleProcess aluminum cassette, (AL, HC) 3" - 25 slot, angled slot (standard) (WHS-M1) H-BAR (top), H-BAR (bottom)
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Process aluminum cassette, (AL, HC) 4" - 25 slot, angled slot (standard) (WHS-M1)
WHS-M1-6
Aluminum cassettes
Algemeen
Process aluminum cassette, (AL, HC) 4" - 25 slot, angled slot (standard) (WHS-M1)
The WHS-M1 Series MCF is an all aluminum 100 mm (4") 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C.
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3 Versions:
Process aluminum cassette, (AL, HC) 4" - 25 slot, angled slot (standard) (WHS-M1) standard: cover-plate (top), H-BAR (bottom)Process aluminum cassette, (AL, HC) 4" - 25 slot, angled slot (standard) (WHS-M1) cover-plate (top), H-BAR (bottom) with handleProcess aluminum cassette, (AL, HC) 4" - 25 slot, angled slot (standard) (WHS-M1) H-BAR (top), H-BAR (bottom)
Webshop
Process aluminum cassette, (AL, HC) 6" - 25 slot, angled slot (standard) (WHS-M1)
WHS-M1-7
Aluminum cassettes
Algemeen
Process aluminum cassette, (AL, HC) 6" - 25 slot, angled slot (standard) (WHS-M1)
The WHS-M1 Series MCF is an all aluminum 150 mm (6") 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C.
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3 Versions:
Process aluminum cassette, (AL, HC) 6" - 25 slot, angled slot (standard) (WHS-M1) standard: cover-plate (top), H-BAR (bottom)Process aluminum cassette, (AL, HC) 6" - 25 slot, angled slot (standard) (WHS-M1) cover-plate (top), H-BAR (bottom) with handleProcess aluminum cassette, (AL, HC) 6" - 25 slot, angled slot (standard) (WHS-M1) H-BAR (top), H-BAR (bottom)
Webshop
Process aluminum cassette, (AL, HC) 8" - 25 slot, angled slot (standard) (WHS-M1)
WHS-M1-8
Aluminum cassettes
Algemeen
Process aluminum cassette, (AL, HC) 8" - 25 slot, angled slot (standard) (WHS-M1)
The WHS-M1 Series MCF is an all aluminum 200 mm (8") 25-slot metal cassette with option a end wall handle for processing semiconductor wafers in a thermal
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3 Versions:
Process aluminum cassette, (AL, HC) 8" - 25 slot, angled slot (standard) (WHS-M1) cover-plate (top), H-BAR (bottom)Process aluminum cassette, (AL, HC) 8" - 25 slot, angled slot (standard) (WHS-M1) cover-plate (top), H-BAR (bottom) with handleProcess aluminum cassette, (AL, HC) 8" - 25 slot, angled slot (standard) (WHS-M1) H-BAR (top), H-BAR (bottom)
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Legacy cassette, aluminum (coated), 25 slot, slot-shape angular (WHS-M2)
WHS-M2
Legacy cassettes
Algemeen
Legacy cassette, aluminum (coated), 25 slot, slot-shape angular (WHS-M2)
The M2 series AMC is an all aluminum 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 250° C.
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4 Versions:
Legacy cassette, aluminum (coated), 25 slot, slot-shape angular (WHS-M2) 76 mm (3”)Legacy cassette, aluminum (coated), 25 slot, slot-shape angular (WHS-M2) 100 mm (4”)Legacy cassette, aluminum (coated), 25 slot, slot-shape angular (WHS-M2) 150 mm (6”)
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Legacy cassette, aluminum (coated) top plate, 25 slot, slot-shape angular (WHS-M2)
WHS-M2-TP
Legacy cassettes
Algemeen
Legacy cassette, aluminum (coated) top plate, 25 slot, slot-shape angular (WHS-M2)
The M2 series AMC is an all aluminum 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 250° C.
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4 Versions:
Legacy cassette, aluminum (coated) top plate, 25 slot, slot-shape angular (WHS-M2) 76 mm (3”)Legacy cassette, aluminum (coated) top plate, 25 slot, slot-shape angular (WHS-M2) 100 mm (4”)Legacy cassette, aluminum (coated) top plate, 25 slot, slot-shape angular (WHS-M2) 150 mm (6”)
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Stainless steel cassette (WHS-M3)
WHS-M3
Stainless steel cassettes
Algemeen
Stainless steel cassette (WHS-M3)
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4 Versions:
Stainless steel cassette (WHS-M3) 76 mm (3”)Stainless steel cassette (WHS-M3) 100 mm (4”)Stainless steel cassette (WHS-M3) 150 mm (6”)
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Aluminum metal process cassette 300 mm (WHS-M4)
WHS-M4-1807002
300 mm cassettes
Algemeen
Aluminum metal process cassette 300 mm (WHS-M4)
300 mm (12”)
25
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