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POLOS PC330
Spray Coaters
POLOS
POLOS® Table-Top Photoresist Spray Coating Systems are used for precision coating in R&D and small volume production. Typical applications include photo
Max. spray area: 300 mm x 300 mm
Spray width: 1 mm to 100 mm
Benchtop model
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POLOS UC320
Spray Coaters
POLOS
POLOS® Table-Top Ultrasonic Spray Coating Systems are used for precision coating in R&D and small volume production. Typical applications include photor
Max. spray area: 150 mm x 150 mm
Spray width: 1 mm to 100 mm
Benchtop model
Webshop
POLOS UC330
Spray Coaters
POLOS
POLOS® Table-Top Ultrasonic Spray Coating Systems are used for precision coating in R&D and small volume production. Typical applications include photor
Max. spray area: 300 mm x 300 mm
Spray width: 1 mm to 100 mm
Benchtop model
Webshop
PM-100-start
UV Direct Laser Writers
POLOS
The POLOS® PM-100 Start is a versatile UV laser writer with high precision components. Designed to give the user the highest degree of freedom to create mic
100 x 100 mm
0.8 - 2.5 µm (5 µm optional)
405 or 375 nm
Table-top system
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PM-100
UV Direct Laser Writers
POLOS
The POLOS® PM-100 is a versatile UV laser writer with high precision components. Designed to give the user the highest degree of freedom to create nanostruc
100 x 100 mm
0.3 - 0.6 - 0.9 μm (5 µm optional)
405 nm (375 nm optional)
Table-top system
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MDA-400LJ
Manual Mask Aligners
MIDAS
The MDA-400LJ is a mask aligner especially designed for university and research institutes. It has a maintenance-free 365 nm LED light source and therefore idea
100 mm (Up to 4")
Manual
UV LED light source
Table-top system
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MDA-400M
Manual Mask Aligners
MIDAS
Highly accurate MDA-400M is designed for research organizations who want to work with a state of the art technology mask aligner to easily develop their process
100 mm (Up to 4")
Manual
350W UV lamp
Table-top system
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MDA-400M-6
Manual Mask Aligners
MIDAS
Highly accurate MDA-400M-6 is designed for research organizations who want to work with a state of the art technology mask aligner to easily develop their proce
150 mm (Up to 6")
Manual
350W UV lamp
Table-top system
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MDA-12SA
Semi-Automatic Mask Aligners
MIDAS
The brand new MDA-12SA represents the next generation of Full-Field lithography systems. It offers a more reliable operation, higher Overlay Accuracy, higher pr
300 mm (Up to 12")
Semi automatic
2-5 kW UV lamp
Stand-alone system
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MDA-600S
Semi-Automatic Mask Aligners
MIDAS
The semi-automatic bench top mask aligner MDA-600S provides a higher performance of alignment accuracy and resolution. It is an ideal and economical tool for Un
150 mm (Up to 6")
Semi automatic
350W UV lamp
Table-top system
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MDA-80MS
Semi-Automatic Mask Aligners
MIDAS
The MDA-80MS offers a higher alignment accuracy and more flexible process of all applications. This stabilized system can reliably process substrates up to 8&am
200 mm (Up to 8")
Semi automatic
1000W UV lamp
Table-top system
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MDA-12FA
Full-Automatic Mask Aligners
MIDAS
The brand new MDA-12FA represents the next generation of Full-Field lithography systems. It's great for Ceramic, Probe Card and WLP applications.
300 mm (Up to 12")
Full automatic
5 kW UV lamp
Stand-alone system
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MDA-80FA
Full-Automatic Mask Aligners
MIDAS
The brand new MDA-80FA represents the next generation of Full-Field lithography systems. It's great for Ceramic, Probe Card and WLP applications.
200 mm (Up to 8")
Full automatic
1000W UV lamp
Stand-alone system
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Reticle-Cases
Accessories
CYGNUS
Protect your assets with our High Quality reticle cases. POLOS carries a complete line of Reticle Boxes (Reticle Cases) for both Canon and Nikon Steppers.
5" (125 mm) or 6" (150 mm)
Canon or Nikon Steppers
N/A
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FR-pOrtable
Single Point Measurement
POLOS
FR-pOrtable is a unique, miniaturized, turn-key solution for accurate & precise non-destructive optical characterization of transparent and semi-transparent
12 nm to 90 μm
380 nm - 1020 nm
20,000 h
Portable system
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FR-pRo
Single Point Measurement
POLOS
FR-pRo is a modular and expandable platform for the characterization of coatings in the 1 nm - 1 mm thickness range. It is used in a wide range of applications
1 nm to 120 μm
190 nm - 1100 nm
Table-top System
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FR-Scanner
Wafer Mapping
POLOS
FR-Scanner is a compact bench-top tool for the automatic characterization of films and coatings on wafers, masks or other substrates. It is ideal for the fast a
3 nm to 100 um
200 nm - 1020 nm
Tabletop System
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HARE-SQ-2
Photoresist
KemLab
The HARE-SQ series is an epoxy based negative photoresist designed for polymeric MEMS, microfluidics, micromachining and other microelectronic applications.
Film Thickness: 2 µm
Negative tone Photoresist
Superior cleanliness and optical clarity
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HARE-SQ-5
Photoresist
KemLab
The HARE-SQ series is an epoxy based negative photoresist designed for polymeric MEMS, microfluidics, micromachining and other microelectronic applications.
Film Thickness: 5 µm
Negative tone Photoresist
Superior cleanliness and optical clarity
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HARE-SQ-10
Photoresist
KemLab
The HARE-SQ series is an epoxy based negative photoresist designed for polymeric MEMS, microfluidics, micromachining and other microelectronic applications.
Film Thickness: 10 µm
Negative tone Photoresist
Superior cleanliness and optical clarity
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HARE-SQ-25
Photoresist
KemLab
The HARE-SQ series is an epoxy based negative photoresist designed for polymeric MEMS, microfluidics, micromachining and other microelectronic applications.
Film Thickness: 25 µm
Negative tone Photoresist
Superior cleanliness and optical clarity
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HARE-SQ-50
Photoresist
KemLab
The HARE-SQ series is an epoxy based negative photoresist designed for polymeric MEMS, microfluidics, micromachining and other microelectronic applications.
Film Thickness: 50 µm
Negative tone Photoresist
Superior cleanliness and optical clarity
Webshop
coin-style-shipper
Coin Style Shippers
EPAK
Single wafer shipping container for safe transporting of your wafers. These coin style shippers are designed to absorb impact and have a screw-on lid for secure
2" (50 mm) - 6" (150 mm)
Natural PP
Transparent
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coin-style-shipper-esd
Coin Style Shippers
EPAK
Single wafer shipping container in ESD safe material for safe transporting of your wafers. These coin style shippers are designed to absorb impact and have a sc
2" (50 mm) - 6" (150 mm)
Natural PP (ESD-Safe)
Black
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Wafer-Shipping-Box
Wafer Shipping Boxes
EPAK
Wafer Shipping box to hold multiple wafers by the edge. Designed to interface with automated equipment.
1" (25 mm) - 6" (150 mm)
Natural PP
Transparent
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