Spin Coating Developing
Spin Coater Requirements:
- Spin coater POLOS Advanced with Automatic Chemical Dispense
- Teflon® (PTFE) Housing
- Exhaust / Drain Combination
- Dispense Vessel
Spin Coater Options:
A full range of substrate size matching vacuum or non-vacuum chucks is available, for easy centering.
- Centering Tool
- Backside Rinse
- Edge Bead Removal
- Additional Injector Lines
- Auto Lid-Lock
Recommended models:
- Up to 150mm*
- Up to 200mm*
- Up to 300mm*