Spin Coating Developing

Spin Coater Requirements:

  • Spin coater POLOS Advanced with Automatic Chemical Dispense
  • Teflon® (PTFE) Housing
  • Exhaust / Drain Combination
  • Dispense Vessel

Spin Coater Options:

A full range of substrate size matching vacuum or non-vacuum chucks is available, for easy centering.

  • Centering Tool
  • Backside Rinse
  • Edge Bead Removal
  • Additional Injector Lines
  • Auto Lid-Lock

Recommended models:

  • Up to 150mm*
  • Up to 200mm*
  • Up to 300mm*
Check the chemical compatibility of your process with the NPP Or PTFE Bowl-material