Our POLOS® Table-Top Ultrasonic Spray Coating Systems are used for precision coating in the fields of R&D and small volume production. Typical applications include photoresist coatings for various wafer materials and creating functional layers for thin-film processes.
The all new POLOS® UC320 system allows highly precision nano-particle coating with more efficient photoresist consumption compared to standard photoresist application techniques. On our Ultrasonic Spray Coating Systems the material usage ratio exceeds 95%, this will allow our users to reduce costs of photoresist consumption and improve their process efficiency. Listening to the needs of our customers, we designed a compact system with easy-to-use software controls, the ability to choose from the wide range of Ultrasonic Nozzles and complimentary options will allow you to find the perfect match for their process application.
The POLOS® UC320 is standard supplied with integrated syringe pump, carrier gas regulation, ultrasonic generator and controllable motion system. With patented ultrasonic spray technology, the system can provide highly uniform and efficient fine spray coating.