POLOS

POLOS SPIN200i with MegPie Megasonic transducer

POLOS SPIN200i with MegPie Megasonic transducer

Webshop » Coating » Spin Coaters

Product description

Sapphire MegPie

The Sapphire MegPie is a single-wafer Megasonic transducer for cleaning and sonochemical processing. It applies a uniform dose of acoustic energy to a rotating substrate. The MegPie will improve process efficiency and lower process time. It is easy to retrofit to your single-substrate processing tool.

Features & benefits

  • Particle-neutral sapphire resonator – no particles added to the process
  • Patented crystal bond to the resonator
  • Patented RF connection to the crystal
  • Redundant internal RTD temperature monitoring
  • Sapphire resonator compatible with all processing chemistries
  • Uniform direct acoustic energy applied to the process
  • Increased process efficiency
  • Reduced process time
  • Reduced process chemistry usage
  • No moving parts to maintain
  • No consumables – works better than brushes

 

POLOS SPIN200i

The POLOS SPIN200i is a versatile and high-quality substrate spin coater. It is specifically designed for R&D and low volume production. An aerodynamically efficient chamber enhances uniformity, while the natural polypropylene or PTFE construction ensures a metal-free, contamination-free process area that is easy to clean. There's a desktop version for manual or automated (optional) chemical dispense. The In-Deck version is suitable for easy integration in your existing or new wetbench.

Suitable for Coating, Cleaning, Rinse/Dry, Developing, Etching, PDMI, and other processes

Specifications:

  • Up to 8" (200mm) Wafers
  • Up to 6" x 6" (150mm) square
  • Substrates Material: Natural Polypropylene (NPP)
  • Easy, step- by- step recipe programming via large color touchscreen
  • Transparent Lid with syringe holder for central dispensing
  • Electro-magnetic safety lid lock
  • N2 diffuser for N2 purge during process
  • 12.000 RPM (Depending on Substrate / Chuck)
  • High Acceleration and Accuracy Manual Chemical Dispense
  • CW & CCW Rotation
  • (Detachable) Color Touchscreen with Customizable Icons
  • Unlimited Program Storage for recipes with multiple steps each
  • USB Port

Including

  • 1 x A-V87-S96-NPP-HD Vacuum Chuck
  • 1 x D-V10-S50-NPP-HD Fragment Adapter
POLOS

POLOS SPIN200i with MegPie Megasonic transducer

Equipped with MegPie Megasonic transducer
Metal-free, contamination-free process area that is easy to clean
Easy, step- by- step recipe programming via large colour touchscreen
High Acceleration and Accuracy

Specifications

Brand
POLOS
Product Number
POLOS-SPIN200i-megpie
Material
Natural Polypropylene (NPP) or PTFE
Substrate size
Ø200 mm or 6" x 6" square substrates
Model
Desktop or Integrator
System Type
Standard Series
Status
Request information

Options

Webshop
SPIN200i-LNR
Accessories & Options
POLOS
Liners for SPIN200i (consists of 20 sets)
320.65

Webshop » Coating » Accessories & Options
Liners are available in PET (Polyethylene terephthalate). 0.5 mm thick, transparent, antistatic (108 - 1010 Ω) to prevent possible build-up of stat
For model SPIN200i
Thickness: 0.5 mm
Set consists of 20 of lid and bowl liners
Webshop
37596
Accessories & Options
POLOS
Centering Aid (For 200 mm)
462.704

Webshop » Coating » Accessories & Options
Centering Aid for easy and accurate alignment of your substrate. For use with the POLOS SPIN150i or SPIN200i/POLOS 200 Advanced spin coaters.
2" up to 8"
For use with POLOS SPIN200i or POLOS 200 Advanced
N/A
Webshop
SHSK
Accessories & Options
POLOS
Syringe Holder Starter Kit
235.95

Webshop » Coating » Accessories & Options
Syringe Holder Starter Kit for thick, pastes or thin fluids. Including needles, pistons, barrel tips and barrel ends.
For thick and thin fluids
Includes 5 pieces of each tool
Set of the most commonly used parts
Webshop
VP-230V
Accessories & Options
POLOS
Vacuum Pump (Oil-less)
1005.5584

Webshop » Coating » Accessories & Options
VP-230 oil-less vacuum pump is a small footprint, lightweight pump wich is ideal for labratory applications.
Max air flow: 166 L/min
Frequency: 50 Hz
Max vacuum (abs): 80 mbar