POLOS

SPIN200x Spin coater - Standard PTFE - Integrator Model

Product description

The POLOS SPIN200i is a versatile and high-quality substrate spin coater. It is specifically designed for R&D and low volume production. An aerodynamically efficient chamber enhances uniformity, while the natural polypropylene or PTFE construction ensures a metal-free, contamination-free process area that is easy to clean. This In-Deck Version is suitable for easy integration in your existing or new wetbench.

Suitable for Coating, Cleaning, Rinse/Dry, Developing, Etching, PDMI, and other processes

Specifications:

  • Up to 8" (200 mm) Wafers
  • Up to 6" x 6" (150 mm) square Substrates
  • Material: PTFE Easy, step- by- step recipe programming via large colour touchscreen
  • Transparent Lid with syringe holder for central dispensing
  • Electro-magnetic safety lid lock
  • N2 diffuser for N2 purge during process
  • 12.000 RPM (Depending on Substrate / Chuck)
  • High Acceleration and Accuracy
  • Manual Chemical Dispense
  • CW & CCW Rotation (Detachable) Colour Touchscreen with Customisable Icons
  • Unlimited Program Storage for recipes with multiple steps each
  • USB Port

Including

  • 1 x A-V87-S96-PTFE-HD Vacuum Chuck
  • 1 x D-V10-S50-PTFE-HD Fragment Adapter
POLOS

SPIN200x Spin coater - Standard PTFE - Integrator Model

Choose your size:
Metal-free, contamination-free process area that is easy to clean
Easy, step- by- step recipe programming via large colour touchscreen
Transparent Lid with syringe holder for central dispensing
High Acceleration and Accuracy
Manual Chemical Dis

Specifications

Brand
POLOS
Product Number
SPIN200x-INT-PTFE
Material
PTFE
Substrate size
Ø200 mm or 6" x 6" square substrates
Model
Integrator
System Type
Standard Series
Status
Request information

Options

Webshop
SPIN200X-LNR
Accessories & Options
POLOS
Liners for SPIN200x (consists of 20 sets)
Liners are available in PET (Polyethylene terephthalate). 0.5 mm thick, transparent, antistatic (108 - 1010 Ω) to prevent possible build-up of stat
For model SPIN200x
Thickness: 0.5 mm
Set consists of 20 of lid and bowl liners
Webshop
37596
Accessories & Options
POLOS
Centering Aid (For 200 mm)
Centering Aid for easy and accurate alignment of your substrate. For use with the POLOS SPIN150i or SPIN200i/POLOS 200 Advanced spin coaters.
2" up to 8"
For use with POLOS SPIN200i or POLOS 200 Advanced
N/A
Webshop
SHSK
Accessories & Options
POLOS
Syringe Holder Starter Kit
Syringe Holder Starter Kit for thick, pastes or thin fluids. Including needles, pistons, barrel tips and barrel ends.
For thick and thin fluids
Includes 5 pieces of each tool
Set of the most commonly used parts
Webshop
VP-230V
Accessories & Options
POLOS
Vacuum Pump (Oil-less)
VP-230 oil-less vacuum pump is a small footprint, lightweight pump wich is ideal for labratory applications.
Max air flow: 166 L/min
Frequency: 50 Hz
Max vacuum (abs): 80 mbar
Webshop
OPUS-50-EU
Accessories & Options
HIRSCHMANN
Opus Dispenser 50 ml
Quicker dispensing with higher reliability of results: Opus® 50 ml Dispenser ensures that the efficiency and precision are achieved which quality laboratori
50 ml
Electronic control and motorized volume dispensing ensures reproducible results
Intuitive control via touchscreen
Webshop
29243
Accessories & Options
POLOS
Drain hose 1,5m with 1" F-NPT / G1,5" PP
NPP Corrugated Drainhose including connector 1,5m
1,5m
Connects to drainport
Corrugated drainhose and connector
Webshop
26835
Accessories & Options
POLOS
Drain hose 5m with 1" F-NPT / G1,5" PP
NPP Corrugated Drainhose including connector 5m
5m
Connects to drainport
Corrugated drainhose and connector