POLOS

POLOS SPIN150i NPP - Integrator Model

Product description

The POLOS SPIN150i is a versatile and high-quality substrate spin coater, made of PTFE or NPP. It is specifically designed for R&D and low volume production. This In-Deck Version is suitable for easy integration in your existing or new wetbench.
Suitable for Coating, Cleaning, Rinse/Dry, Developing, Etching, PDMI, and other processes

Specifications:

  • Up to 6" (150 mm) Wafers
  • Up to 4" x 4" (100 mm) square Substrates
  • Material: Natural Polypropylene (NPP)
  • Easy, step- by- step recipe programming via large colour touchscreen
  • Transparent Lid with syringe holder for central dispensing
  • Electro-magnetic safety lid lock
  • N2 diffuser for N2 purge during process
  • 12.000 RPM (Depending on Substrate / Chuck)
  • High Acceleration and Accuracy
  • Manual Chemical Dispense
  • CW & CCW Rotation
  • Detachable Colour Touchscreen with Customisable Icons
  • Unlimited Program Storage for recipes with multiple steps each
  • USB Port


Including

  • 1 x A-V36-S45-NPP-HD Vacuum Chuck
  • 1 x D-V10-S50-NPP-HD Fragment Adapter
POLOS

POLOS SPIN150i NPP - Integrator Model

Choose your size:
Easy, step- by- step recipe programming via large colour touchscreen
Transparent Lid with syringe holder for central dispensing
High Acceleration and Accuracy
Manual Chemical Dispense

Specifications

Brand
POLOS
Product Number
42025
Material
Natural Polypropylene (NPP)
Substrate size
Ø150 mm or 4" x 4" square substrates
Model
Integrator
System Type
Standard Series
Status
Request information

Options

Webshop
SPIN150i-LNR
Accessories & Options
POLOS
Liners for SPIN150i (consists of 20 sets)
301.048

Webshop » Coating » Accessories & Options
Liners are available in PET (Polyethylene terephthalate). 0.5 mm thick, transparent, antistatic (108 - 1010 Ω) to prevent possible build-up of stat
For model SPIN150i
Thickness: 0.5 mm
Consists of 20 sets of lid and bowl liners
Webshop
37819
Accessories & Options
POLOS
Centering Aid (For 150 mm)
416.1916

Webshop » Coating » Accessories & Options
Centering Aid for easy and accurate alignment of your substrate. For use with the POLOS SPIN150i spin coaters.
2" up to 6"
For use with POLOS SPIN150i
N/A
Webshop
SHSK
Accessories & Options
POLOS
Syringe Holder Starter Kit
235.95

Webshop » Coating » Accessories & Options
Syringe Holder Starter Kit for thick, pastes or thin fluids. Including needles, pistons, barrel tips and barrel ends.
For thick and thin fluids
Includes 5 pieces of each tool
Set of the most commonly used parts
Webshop
VP-230V
Accessories & Options
POLOS
Vacuum Pump (Oil-less)
1005.5584

Webshop » Coating » Accessories & Options
VP-230 oil-less vacuum pump is a small footprint, lightweight pump wich is ideal for labratory applications.
Max air flow: 166 L/min
Frequency: 50 Hz
Max vacuum (abs): 80 mbar