MIDAS

POLOS MDA-400M - 4" Mask Aligner

POLOS MDA-400M - 4" Mask Aligner
112469.5

Webshop » Mask Aligners » Manual Mask Aligners

Product description

The MDA-400M is designed for research organizations who want to work with a state of the art technology mask aligner. This highly accurate system allows researchers to easily develop their processes on either small substrate pieces or wafers up to 4".

Our manual control MDA-400M series standard feature UV Light source 350 nm to 450 nm, 365 nm
Intensity: 20-30 mW/cm2 and a beam size of 6.25” x 6.25” (3% beam uniformity for 4” wafers) and automatic exposure system. The unit comes with a Dual CCD zoom microscope with 19” LCD monitor:
magnification; 5X-20X digital CCD.
Contact modes include Soft, Vacuum Hard and Proximity. The Vacuum and Hard Contact are adjustable with an alignment accuracy of <1.0 micron.

Options

  • Anti-Vibration table
  • UV Intensity Meter
  • UV-LED (365 nm) Exposure Module
MIDAS

POLOS MDA-400M - 4" Mask Aligner

Easily develop your processes on either small substrate pieces or wafers up to 4"
Features an automatic exposure system
Optional Anti-Vibration table, UV Intensity Meter and UV-LED (365 nm) Exposure Module available

Specifications

Brand
MIDAS
Product Number
MDA-400M
Material
Table-top System
Max. substrate size
Up to 4" (100 mm)
System type
Manual
Light source
350W UV Lamp
Status
Request information

Options

Webshop
3080S
Complementary Equipment
POLOS
Ionizing Pen - Model 3080
1361.25

Webshop » Complementary Equipment » Complementary Equipment
Quickly and easily, remove dust that adheres to surfaces such as silicon wafers and masks. This device is an ideal tool to clean parts and assemblies.
Remove static electricity on a material or object.
Ø1.5 mm air outlet
Pressure speed control is adjustable
Webshop
UV-MTR
Complementary Equipment
POLOS
UV Intensity Meter (365nm)
4295.5

Webshop » Complementary Equipment » Complementary Equipment
The UV Intensity meter represents next generation of full-field UV Intensity meter systems. The sensor and probes are fully digital, so no calibration is needed
Suitable for measuring 365 nm (UV I-Line)
0 ~ 999.99 mW/cm2 intensity
Hand-held