The MDA-400LJ is a mask aligner especially designed for university and research institutes. The system is equipped with a maintenance-free 365 nm LED light source (50,000 hours lifetime) and therefore ideal for resist processing.
Mask aligners with UV light mask light sources use significantly less energy compared to conventional mercury vapor lamps. The lights of the MDA-400LJ mask aligner series do not need to warm-up and cool-down. No need for the cooling fan, filters or shutter. The LED light source is only switched on during the actual exposure process. LED masks have a much longer life-time. In terms of health, safety and environmental protection, the LED technology provides a significant improvement in mask alignment.
Options
- Anti-Vibration table
- UV Intensity Meter
- UV-LED (365 nm) Exposure Module
NOTE: we have a version of this mask aligner available which supports up to 6" substrates. Please contact us for all options!
