POLOS

POLOS 300 Advanced

POLOS 300 Advanced
24747.767

Webshop » Coating » Spin Coaters

Product description

POLOS 300 Advanced Single Substrate Spin Processor, Desktop version or Integrator model, automatic chemical dispense, heavy duty motor. This revolutionary spin coater series can be used as a full automatic solution for your process. It supports a large variety of fluids thanks to the full plastic housing available in natural polypropylene as well PTFE. It is suitable for processing fragments as small as 5 mm even for processing fragments as small as 5 mm.

Suitable for Coating, Cleaning, Rinse/Dry, Developing, Etching, PDMI, and other processes

Specifications:

  • Up to 300 mm round or 8” x 8” square substrates
  • Material: Natural Polypropylene (High grade NPP, tool body and all wetted surfaces) or PTFE
  • Post-CMP cleaning LIGA processes
  • TSV processing
  • Mask cleaning
  • Etch assist
  • SU-8 develop
  • Plating pre-cleaning Lift off
  • Pre-plating bubble removal
  • Resist strip
  • Post-laser cleaning
  • CW & CCW Puddle Rotation
  • (Detachable) Colour Touchscreen with Customisable Icons
  • Glove friendly, IP52, chemical resistant
  • Unlimited Program Storage for recipes with multiple steps each
  • USB Port
  • Standard 1" Drain Connection
  • Compatible with our sapphire MegPie megasonic transducer
  • We also offer optional backside Rinse and Pneumatic Lid

Including:

  • 3 Programmable Dry Relays, nominal switching capacity 0.5A / 125 VAC - 0.3A / 60DC
  • 1 x Vacuum Chuck A-V87-S96-NPP-HD
POLOS

POLOS 300 Advanced

Choose your size:
Automatic chemical dispense
Heavy duty motor
Supports a large variety of fluids
Up to 6 automatic dispensers

Specifications

Brand
POLOS
Product Number
POLOS-300-Advanced
Material
Natural Polypropylene (NPP) or PTFE
Substrate size
Ø300 mm or 8" x 8" square substrates
Model
Desktop or Integrator
System Type
Advanced Series
Status
Request information

Options

Webshop
37820
Accessories & Options
POLOS
Centering Aid (For 300 mm)

Webshop » Coating » Accessories & Options
Centering Aid for easy and accurate alignment of your substrate. For use with the POLOS 300 Advanced spin coaters.
6" up to 12"
For use with POLOS 300 Advanced
N/A
Webshop
Dispense Vessel (complete)
Accessories & Options
POLOS
PTFE Dispense Vessel (complete set)
7013.1237

Webshop » Coating » Accessories & Options
Auto Dispense Lines Full PTFE dispense vessel automated injector line.
Precision Regulator 0.05-2 Bar
Automated injector line
Male Connector
Webshop
VP-230V
Accessories & Options
POLOS
Vacuum Pump (Oil-less)
1005.5584

Webshop » Coating » Accessories & Options
VP-230 oil-less vacuum pump is a small footprint, lightweight pump wich is ideal for labratory applications.
Max air flow: 166 L/min
Frequency: 50 Hz
Max vacuum (abs): 80 mbar