POLOS

POLOS 300 Advanced NPP - Integrator Model

POLOS 300 Advanced NPP - Integrator Model
40312.118

Webshop » Coating » Spin Coaters

Product description

POLOS 300 Advanced Single Substrate Spin Processor, In-Deck version, automatic chemical dispense, heavy duty motor. This revolutionary spin coater series can be used as a full automatic solution for your process. It supports a large variety of fluids thanks to the full plastic housing available in natural polypropylene as well PTFE. It is suitable for processing fragments as small as 5 mm even for processing fragments as small as 5 mm.

Suitable for Coating, Cleaning, Rinse/Dry, Developing, Etching, PDMI, and other processes

Specifications:

  • Up to 300 mm round or 8” x 8” square substrates
  • Material: Natural Polypropylene (High grade NPP, tool body and all wetted surfaces)
  • Post-CMP cleaning
  • LIGA processes
  • TSV processing
  • Mask cleaning
  • Etch assist SU-8 develop
  • Plating pre-cleaning Lift off
  • Pre-plating bubble removal
  • Resist strip
  • Post-laser cleaning
  • CW & CCW Puddle Rotation
  • (Detachable) Colour Touchscreen with Customisable Icons
  • Glove friendly, IP52, chemical resistant
  • Unlimited Program Storage for recipes with multiple steps each
  • USB Port
  • Standard 1" Drain Connection
  • Compatible with our sapphire MegPie megasonic transducer
  • We also offer optional backside Rinse and Pneumatic Lid

Including:

  • 3 Programmable Dry Relays, nominal switching capacity 0.5A / 125 VAC - 0.3A / 60DC
  • 1 x Vacuum Chuck A-V87-S96-PTFE-HD
POLOS

POLOS 300 Advanced NPP - Integrator Model

Choose your size:
Automatic chemical dispense
Heavy duty motor
Supports a large variety of fluids
Up to 6 automatic dispensers

Specifications

Brand
POLOS
Product Number
44250
Material
Natural Polypropylene (NPP)
Substrate size
Ø300 mm or 8" x 8" square substrates
Model
Integrator
System Type
Advanced Series
Status
Request information

Options

Webshop
37820
Accessories & Options
POLOS
Centering Aid (For 300 mm)

Webshop » Coating » Accessories & Options
Centering Aid for easy and accurate alignment of your substrate. For use with the POLOS 300 Advanced spin coaters.
6" up to 12"
For use with POLOS 300 Advanced
N/A
Webshop
Dispense Vessel (complete)
Accessories & Options
POLOS
PTFE Dispense Vessel (complete set)
7013.1237

Webshop » Coating » Accessories & Options
Auto Dispense Lines Full PTFE dispense vessel automated injector line.
Precision Regulator 0.05-2 Bar
Automated injector line
Male Connector
Webshop
VP-230V
Accessories & Options
POLOS
Vacuum Pump (Oil-less)
1005.5584

Webshop » Coating » Accessories & Options
VP-230 oil-less vacuum pump is a small footprint, lightweight pump wich is ideal for labratory applications.
Max air flow: 166 L/min
Frequency: 50 Hz
Max vacuum (abs): 80 mbar