POLOS

POLOS 200 Advanced PTFE - Integrator Model

Product description

POLOS 200 Advanced Single Substrate Spin Processor, In-Deck version, automatic chemical dispense, heavy duty motor. It supports a large variety of fluids thanks to the full plastic housing available in natural polypropylene as well PTFE. The control of the motor mode rotation, in combination with the up to 6 automatic dispensers in the POLOS Advanced systems, enables a uniform deposition of multilayer thin films and photo resist development. These features enable a quick process optimization with fully automatic recipes and high reproducibility.

Suitable for Coating, Cleaning, Rinse/Dry, Developing, Etching, PDMI, and other processes

Specifications:

  • Up to 260 mm round or 6” x 6” square substrates
  • Material: PTFE (High grade PTFE, tool body and all wetted surfaces)
  • Transparent Lid with syringe holder for central dispensing
  • CW & CCW Puddle Rotation
  • (Detachable) Colour Touchscreen with Customisable Icons
  • Glove friendly, IP52, chemical resistant
  • Unlimited Program Storage for recipes with multiple steps each
  • USB Port
  • Standard 1" Drain Connection
  • Compatible with our sapphire MegPie megasonic transducer
  • We also offer optional backside Rinse and Pneumatic Lids, vacuum pumps, dispence vessels and a Jet Spray injector for this series!


Including:

  • 3 Programmable Dry Relays, nominal switching capacity 0.5A / 125 VAC - 0.3A / 60DC
  • 1 Piece Vacuum Chuck A-V36-S45-PTFE for substrates up to Ø 150mm and 1 piece Fragment Adapter D-V10-S50-NPP
    Or
  • 1 Piece Vacuum Chuck A-V87-S96-PTFE for substrates from Ø100 mm up to Ø200 mm (Please specify in your Request for Quote or order. If you are not sure which one is best suitable for your solution, please contact us for advice.)
POLOS

POLOS 200 Advanced PTFE - Integrator Model

Choose your size:
Automatic chemical dispense
Heavy duty motor
Supports a large variety of fluids
Up to 6 automatic dispensers

Specifications

Brand
POLOS
Product Number
42842
Material
PTFE
Substrate size
Ø260 mm or 6" x 6" square substrates
Model
Integrator
System Type
Advanced Series
Status
Request information

Options

Webshop
37596
Accessories & Options
POLOS
Centering Aid (For 200 mm)
462.704

Webshop » Coating » Accessories & Options
Centering Aid for easy and accurate alignment of your substrate. For use with the POLOS SPIN150i or SPIN200i/POLOS 200 Advanced spin coaters.
2" up to 8"
For use with POLOS SPIN200i or POLOS 200 Advanced
N/A
Webshop
SHSK
Accessories & Options
POLOS
Syringe Holder Starter Kit
235.95

Webshop » Coating » Accessories & Options
Syringe Holder Starter Kit for thick, pastes or thin fluids. Including needles, pistons, barrel tips and barrel ends.
For thick and thin fluids
Includes 5 pieces of each tool
Set of the most commonly used parts
Webshop
VP-230V
Accessories & Options
POLOS
Vacuum Pump (Oil-less)
1005.5584

Webshop » Coating » Accessories & Options
VP-230 oil-less vacuum pump is a small footprint, lightweight pump wich is ideal for labratory applications.
Max air flow: 166 L/min
Frequency: 50 Hz
Max vacuum (abs): 80 mbar